Welcome to the master of Nanoscale Engineering of lyon Retour à l'université de Lyon

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MEMS and NEMS

MEMS and NEMS (UE S2-2)

This course deals with micro-electro-mechanical systems (MEMS), their technological aspects, their applications, and their design. The evolution of such systems toward the nanometer scale (nano-electro-mechanical systems ,NEMS) is also discussed.

Outline of the course

  • Introduction to MEMS/NEMS
  • Materials for MEMS and NEMS properties of silicon
  • Principles of operation and examples
  • Modeling of MEMS/NEMS

Evaluation

  • written exam


course volume


  • lectures/tutorials:  20 hours
  • ECTS: 2