Welcome to the master of Nanoscale Engineering of lyon Retour à l'université de Lyon

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Micro- and Nanofabrication 1 & 2

Micro- and Nanofabrication (UE S1-2)

This course presents the different techniques to fabricate nanomaterials – nanoparticles, nanowires, nanolayers, but also nanostructured materials, made of ceramics, metals or polymers – by top‐down and bottom‐up techniques. A non‐negligible part of this teaching implies practicals in research labs complementing the theoretical aspects tackled during lectures. A first part of the course is organized in the 1st semester and a 2nd part of the course in the 2nd semester.

Outline of the course

  • Introduction
    • Emergence of nanotechnology
    • Nanostructures in zero, one, two and three dimensions
    • "bottom-up" and "top-down" approaches

  • Zero-dimensional nanostructures: nanoparticles
    • Nucleation and homogeneous growth
    • Synthesis of metal nanoparticles (reduction)
    • Synthesis of oxide nanoparticles (sol-gel process)
    • Synthesis in confined environments (micelles, emulsions)

  • One-dimensional nanostructures: Nanowires and nanorods
    • Spontaneous growth (evaporation/dissolution-condensation)
    • Growth by vapor-liquid-solid (VLS) and solution-liquid-solid (SLS) techniques
    • Synthesis from a preform (electrochemical deposition, colloidal dispersion, chemical vapor deposition)
    • Polymer-derived ceramics

  • Two-dimensional nanostructures: layers
    • Chemical vapor deposition (CVD) and physical vapor deposition (PVD)
    • Electrochemical deposition
    • Sol-gel layers

  • Other nanostructures
    • Fullerenes and carbon nanotubes
    • Core-shell systems
    • Porous structures and hybrids

  • Nanostructuring by physical processes
    • Photolithography and electron-beam lithography
    • Nanolithography: atomic force microscopy and scanning-tunneling microscopy
    • Other methods: mechano-synthesis

  • Conclusions

  • Lab practicals in the NanoLyon cleanroom


  • Final written exam
  • Intermediate written exam
  • Graded reports on lab practicals

course volume

  • lectures: 35 hours
  • practicals: 25 hours
  • ECTS: 6