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Micro- and Nanofabrication 1 & 2
Micro- and Nanofabrication (UE S1-2)
This course presents the different techniques to fabricate nanomaterials – nanoparticles, nanowires, nanolayers, but also nanostructured materials, made of ceramics, metals or polymers – by top‐down and bottom‐up techniques. A non‐negligible part of this teaching implies practicals in research labs complementing the theoretical aspects tackled during lectures. A first part of the course is organized in the 1st semester and a 2nd part of the course in the 2nd semester.
Outline of the course
- Introduction
- Emergence of nanotechnology
- Nanostructures in zero, one, two and three dimensions
- "bottom-up" and "top-down" approaches
- Zero-dimensional nanostructures: nanoparticles
- Nucleation and homogeneous growth
- Synthesis of metal nanoparticles (reduction)
- Synthesis of oxide nanoparticles (sol-gel process)
- Synthesis in confined environments (micelles, emulsions)
- One-dimensional nanostructures: Nanowires and nanorods
- Spontaneous growth (evaporation/dissolution-condensation)
- Growth by vapor-liquid-solid (VLS) and solution-liquid-solid (SLS) techniques
- Synthesis from a preform (electrochemical deposition, colloidal dispersion, chemical vapor deposition)
- Polymer-derived ceramics
- Two-dimensional nanostructures: layers
- Chemical vapor deposition (CVD) and physical vapor deposition (PVD)
- Electrochemical deposition
- Sol-gel layers
- Other nanostructures
- Fullerenes and carbon nanotubes
- Core-shell systems
- Porous structures and hybrids
- Nanostructuring by physical processes
- Photolithography and electron-beam lithography
- Nanolithography: atomic force microscopy and scanning-tunneling microscopy
- Other methods: mechano-synthesis
- Conclusions
- Lab practicals in the NanoLyon cleanroom
Evaluation
- Final written exam
- Intermediate written exam
- Graded reports on lab practicals
course volume
- lectures: 35 hours
- practicals: 25 hours
- ECTS: 6
