Welcome to the master of Nanoscale Engineering of lyon Retour à l'université de Lyon

  • french version

NSE home > Curriculum


Surface-Analysis Techniques

Surface-Analysis Techniques (UE S3-2)


Outline of the course

  1. Introduction
    • Context and Parameters
    • X-Ray interaction with matter
    • Electron interaction with matter
    • Ion interaction with matter

  2. X-Ray detection based surface analysis techniques
    • Fluorescence
    • Diffraction

  3. Electron detection based surface analysis techniques
    1. XPS – X-ray Photoelectron Spectroscopy
      • Principles (Auger electron energy; spectra derivation)
      • Instrumentation
      • Qualitative and quantitative analysis (core levels, chemical shifts, Auger parameter, valence levels, imaging)

    2. AES – Auger Electron Spectroscopy
      • Principles (photoelectric effect, calibration, charge effect)
      • Instrumentation
      • Qualitative and quantitative analysis (qualitative analysis, depth profiling, SAM, chemical shifts)

  4. Ion detection based surface analysis techniques
    1. SIMS – Secondary Ion Mass Spectrometry
      • Sputtering & ionisation
      • Instrumentation (ion sources, mass analysers, detectors)
      • Dynamic SIMS – static SIMS (ToF-SIMS)
      • Applications

    2. ISS – Ion Scattering Spectroscopy and RBS – Rutherford Backscattering
      • Low energy ion diffusion - ISS
      • High energy ion diffusion - RBS
      • Instrumentation
      • Applications

Evaluation

  • written exam

Bibliography



course volume


  • lectures: 30 hours
  • practicals: 8 hours
  • ECTS: 5