WebAdmin
Surface-Analysis Techniques
Surface-Analysis Techniques (UE S3-2)
This course introduces the main methods involved in the surface analysis of material surfaces. It tackles questions on the chemistry and physics of the various approaches and discuss the advantages and shortcomings of a high number of methods including XRF, XPS, AES, SEM(-EDX), SIMS, ToF-SIMS, ISS,…
Outline of the course
- Introduction
- Context and Parameters
- X-Ray interaction with matter
- Electron interaction with matter
- Ion interaction with matter
- X-Ray detection based surface analysis techniques
- Fluorescence
- Diffraction
- Electron detection based surface analysis techniques
- XPS – X-ray Photoelectron Spectroscopy
- Principles (Auger electron energy; spectra derivation)
- Instrumentation
- Qualitative and quantitative analysis (core levels, chemical shifts, Auger parameter, valence levels, imaging)
- AES – Auger Electron Spectroscopy
- Principles (photoelectric effect, calibration, charge effect)
- Instrumentation
- Qualitative and quantitative analysis (qualitative analysis, depth profiling, SAM, chemical shifts)
- XPS – X-ray Photoelectron Spectroscopy
- Ion detection based surface analysis techniques
- SIMS – Secondary Ion Mass Spectrometry
- Sputtering & ionisation
- Instrumentation (ion sources, mass analysers, detectors)
- Dynamic SIMS – static SIMS (ToF-SIMS)
- Applications
- ISS – Ion Scattering Spectroscopy and RBS – Rutherford Backscattering
- Low energy ion diffusion - ISS
- High energy ion diffusion - RBS
- Instrumentation
- Applications
- SIMS – Secondary Ion Mass Spectrometry
Evaluation
- Final written exam
Bibliography
- John C. Vickerman, Ian Gilmore (editors), "Surface Analysis: The Principal Techniques", Wiley, New York, 2009 (second edition)
- John F. Watts, John Wolstenholme, "An Introduction to Surface Analysis by XPS and AES", Wiley, New York, 2003 (second edition)
- John C. Rivière, Sverre Myhra (editors), "Handbook of Surface and Interface Analysis: Methods for Problem-Solving", CRC Press, Boca Raton, 1998
- David Briggs, M.P. Seah (editors), "Practical Surface Analysis: Auger and X-ray Photoelectron Spectroscopy" (Volume 1), Wiley, New York, 1990 (second edition)
- David Briggs, M.P. Seah (editors), "Practical Surface Analysis: Ion and Neutral Spectroscopy" (Volume 2), Wiley, New York, 1990 (second edition)
- A. Benninghoven, F.G. Rüdenauer, H.W. Werner, "Secondary Ion Mass Spectrometry: Basic Concepts, Instrumental Aspects, Applications and Trends", Wiley, New York, 1987
- C. Richard Brundle, Charles A. Evans, Shaun Wilson, "Encyclopedia of Materials Characterization: Surfaces, Interfaces, Thin Films", Butterworth-Heinemann, Stoneham, 1992
- Gernot Friedbacher, Henning Bubert (editors), "Surface and Thin Film Analysis: A Compendium of Principles, Instrumentation, and Applications", Wiley-VCH, Berlin, 2011
course volume
- lecture: 30h
- tutorial: 12h
- practicals: 4h
- autonomy: 2h
- seminar: 2h
- ECTS: 6
